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Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets

✍ Scribed by Harilal, S. S.; Sizyuk, T.; Sizyuk, V.; Hassanein, A.

Book ID: 120287971
Publisher: American Institute of Physics
Year: 2010
Tongue: English
Weight: 798 KB
Volume: 96
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3364141

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