Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source

✍ Scribed by Higashiguchi, Takeshi; Rajyaguru, Chirag; Dojyo, Naoto; Taniguchi, Yosuke; Sakita, Koji; Kubodera, Shoichi; Sasaki, Wataru

• Book ID: 125518655
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 435 KB
• Volume: 76
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.2136874