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Efficient femtosecond laser micromachining of bulk 3C-SiC

✍ Scribed by Farsari, M; Filippidis, G; Zoppel, S; Reider, G A; Fotakis, C

Book ID: 126998893
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 454 KB
Volume: 15
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/15/9/022

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## Abstract Nanoparticles in‐situ formed on single crystalline SiC films under femtosecond pulsed laser irradiation were characterized by SEM, AFM, AES, and Raman scattering. The size, shape, composition and internal stress of nanoparticles were investigated with respect to energy fluences. Femtose