Efficient Calculation Algorithm for One-Dimensional Ion Implantation Profiles With High Tilt Angles

✍ Scribed by Suzuki, K.; Kojima, S.

• Book ID: 114619495
• Publisher: IEEE
• Year: 2008
• Tongue: English
• Weight: 587 KB
• Volume: 55
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2008.926730