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Effects of the substrate on properties of PTO thin film

โœ Scribed by K. Nishida; G. Matuoka; M. Osada; M. Kakihana; T. Katoda


Book ID
108418100
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
193 KB
Volume
216
Category
Article
ISSN
0169-4332

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๐Ÿ“œ SIMILAR VOLUMES


Effects of the substrate on the determin
โœ Ranjana Saha; William D. Nix ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a