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Effects of temperature and pressure on CVD diamond growth from the C-H-O system

✍ Scribed by Y.-Z. Wan; D.W. Zhang; Z.-J. Liu; J.-T. Wang


Publisher
Springer
Year
1998
Tongue
English
Weight
287 KB
Volume
67
Category
Article
ISSN
1432-0630

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## Abstract An on‐line measurement of optical emission spectrum (OES) was used to study the variation of Zn and O components in the plasma of ZnO film growth with reactive radio‐frequency magnetron sputtering method. It was found that the decline of all the Zn emission lines shows three different s