Effects of surface pretreatment of polysilicon electrode prior to Si3N4 deposition on the electrical characteristics of Si3N4 dielectric films

✍ Scribed by Yoon, G.W.; Joshi, A.B.; Kwong, D.L.; Mathews, V.K.; Thakur, R.P.S.; Fazan, P.C.

• Book ID: 114535584
• Publisher: IEEE
• Year: 1994
• Tongue: English
• Weight: 585 KB
• Volume: 41
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.275219