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Effects of substrate temperature on the magnetic and electrical properties of cobalt ferrite/metal composite thin films

✍ Scribed by J. G. Na; C. H. Park; N. H. Heo; J. Kim; K. Park


Book ID
110270424
Publisher
Springer US
Year
1999
Tongue
English
Weight
83 KB
Volume
10
Category
Article
ISSN
0957-4522

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This paper addresses the effects of substrate temperature on electrical and structural properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon. Copper films of 80 and 500 nm were deposited from Cu target in argon ambient gas pressure of 3.6 mTorr at different substrate