𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effects of substrate temperature on structural properties of undoped silicon thin films

✍ Scribed by Das, Chandan; Dasgupta, Arup; Saha, S. C.; Ray, Swati

Book ID
121704474
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
344 KB
Volume
91
Category
Article
ISSN
0021-8979

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Effects of substrate temperature on elec
Effects of substrate temperature on electrical and structural properties of copper thin films
✍ Kah-Yoong Chan; Teck-Yong Tou; Bee-San Teo πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 444 KB

This paper addresses the effects of substrate temperature on electrical and structural properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon. Copper films of 80 and 500 nm were deposited from Cu target in argon ambient gas pressure of 3.6 mTorr at different substrate