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Effects of Substrate Degassing on Co-Cr Films in Continuous Fabrication by Sputtering

✍ Scribed by Iwasaki, S.; Ouchi, K.; Kimura, M.


Book ID
119817940
Publisher
Institute of Electrical and Electronics Engineers
Year
1985
Weight
300 KB
Volume
1
Category
Article
ISSN
0882-4959

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