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Effects of Stain Etchant Composition on the Photoluminescence and Morphology of Porous Silicon

✍ Scribed by Nahidi, Mona; Kolasinski, Kurt W.

Book ID
118174816
Publisher
The Electrochemical Society
Year
2006
Tongue
English
Weight
275 KB
Volume
153
Category
Article
ISSN
0013-4651

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Structure and photoluminescence studies
Structure and photoluminescence studies of porous silicon formed in ferric ion containing stain etchants
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## Abstract Stain etching of silicon in aqueous solutions composed of FeCl~3~ + HF + concentrated (HClO~4~ or H~2~SO~4~) leads to highly luminescent porous Si with a unique dual layer structure. The upper layer (∼3 μm thick) exhibits bluer luminescence (peaked at 560–590 nm) and a porosity in exces