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Effects of polymer/metal interaction in thin-film multichip module applications

โœ Scribed by Adema, G.M.; Turlick, I.; Hwang, L.-T.; Rinne, G.A.; Berry, M.J.

Book ID
117872822
Publisher
IEEE
Year
1990
Tongue
English
Weight
801 KB
Volume
13
Category
Article
ISSN
0148-6411

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## Abstract Advanced metal deposition and microfabrication techniques enable preparation of metal surfaces with high precision and excellent control over their size and shape with subnanometer resolution. Thin metal films of different types and functions can be found in many analytical instruments.