Effects of p(O2) and p(CO2) on epitaxial growth of BaTiO3 thin films on MgO(100) substrates by using metal organic acid salts

Growth and microstructure of MgO thin fi

Growth and microstructure of MgO thin films on Si(100) substrates by metal–organic molecular beam epitaxy

✍ F Niu; B.H Hoerman; B.W Wessels 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 247 KB

MgO thin films have been grown on Si 100 substrates at low temperatures of 500-8508C by metal-organic molecular Ž . beam epitaxy MOMBE using the solid precursor magnesium acetylacetonate. Oxygen plasma is required to achieve Ž . deposition. The composition of the films was determined by Auger electr