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Effects of plasmas on porous low dielectric constant CVD SiOCH films

✍ Scribed by E. Vinogradova; E. Osei-Yiadom; C.E. Smith; D.W. Mueller; R.F. Reidy

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 650 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.10.018

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