Effects of photoresist polymer molecular weight on line-edge roughness and its metrology probed with Monte Carlo simulations

✍ Scribed by G.P. Patsis; V. Constantoudis; E. Gogolides

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 564 KB
• Volume: 75
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.06.005