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Effects of Oxynitride Buffer Layer on the Electrical Characteristics of Poly-Silicon TFTs Using Gate Dielectric

✍ Scribed by Tung-Ming Pan; Tin-Wei Wu

Book ID: 114619390
Publisher: IEEE
Year: 2008
Tongue: English
Weight: 1009 KB
Volume: 55
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2008.920030

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