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Effects of oxygen plasma treatments on the formation of ohmic contacts to GaN

✍ Scribed by J Yan; M.J Kappers; Z.H Barber; C.J Humphreys

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 171 KB
Volume: 234
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2004.05.066

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