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Effects of (NH4)2Sx treatment on surface work function and roughness of indium–tin-oxide

✍ Scribed by Yow-Jon Lin; Chang-Feng You; Chia-Lung Tsai

Book ID
108060077
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
319 KB
Volume
253
Category
Article
ISSN
0169-4332

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Passivation effect of (nh4)2sx treatment
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✍ Kyung-Soo Suh; Jong-Lam Lee; Hyung-Ho Park; Chan-Ho Kim; Jae-jin Lee; Kee-Soo Na 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 430 KB

Surface'properties of GaAs passivated with (NH&Sx solution have been analyzed in GaAs wafer and photo-resist-treated GaAs using X-ray photoelectron spectroscopy. Sulfur treatment on GaAs surface results in the formation of S-Ga and S-As bonds, which remain after successive rinsing for 1 min in DI wa