Effects of Mo(CO)6 and W(CO)6 introduced to plasma on diamond synthesis by microwave plasma CVD

✍ Scribed by Nagano, Masamitsu; Urasaki, Takashi; Wakiyama, Kazuhiro; Komori, Masaharu

• Book ID: 121826877
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 459 KB
• Volume: 6
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(96)00655-3