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Effects of laser scans on the diffusion depth and diffusivity of gallium in n-type 4H–SiC during laser doping

✍ Scribed by Geunsik Lim; Aravinda Kar

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 573 KB
Volume: 176
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2011.02.011

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