Effect of laser field and thermal stress
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Sachin Bet; Nathaniel Quick; Aravinda Kar
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Article
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2007
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Elsevier Science
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English
⚖ 407 KB
The electromagnetic field of lasers and non-equilibrium doping conditions enable laser doping of SiC with increased dopant diffusivity. Chromium, which acts as a double acceptor, has been laser-doped in SiC wafers. A thermal model is utilized to determine the temperature distribution at various dept