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Effects of laser power on the growth of polycrystalline AlN films by laser chemical vapor deposition method

✍ Scribed by You, Yu; Ito, Akihiko; Tu, Rong; Goto, Takashi


Book ID
123403018
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
1022 KB
Volume
232
Category
Article
ISSN
0257-8972

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