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Effects of laser irradiation energy density on the properties of pulsed laser deposited ITO thin films

✍ Scribed by F.O. Adurodija; R. Brüning; I.O. Asia; H. Izumi; T. Ishihara; H. Yoshioka


Publisher
Springer
Year
2005
Tongue
English
Weight
538 KB
Volume
81
Category
Article
ISSN
1432-0630

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Vanadium oxide thin film has been deposited on glass substrate at room temperature using pulsed laser deposition with the laser fluence of 1.4 J/cm 2 under high vacuum. X-ray photoelectron spectroscopy analysis shows that the film is oxygen deficient compared to the stoichiometric V 2 O 5 . X-ray di