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Effects of ion bombardment to interfaces on residual internal stress and crystallite structures on multilayered films

✍ Scribed by Y Miyamoto; K Watanabe; S Nakagawa; M Naoe


Book ID
108390470
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
423 KB
Volume
51
Category
Article
ISSN
0042-207X

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