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Effects of hydrogen implantation temperature on ion-cut of silicon

✍ Scribed by Lee, J. K.; Nastasi, M.; Theodore, N. David; Smalley, A.; Alford, T. L.; Mayer, J. W.; Cai, M.; Lau, S. S.

Book ID
127353352
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
549 KB
Volume
96
Category
Article
ISSN
0021-8979

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