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Effects of hydrogen atmosphere on pulsed-DC sputtered nanocrystalline Si:H films

✍ Scribed by J.S. Cherng; S.H. Chang; S.H. Hong

Book ID
119322475
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
715 KB
Volume
47
Category
Article
ISSN
0025-5408

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## Abstract In this study, the deposition temperature effects on the properties of hydrogenated amorphous silicon films are reported. The a‐Si:H thin films were deposited by DC magnetron sputtering technique, according to a new protocol of deposition. This last consists of a successively several th