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Effects of gas flow speed and chlorine concentration on tellurium uptake in gas-phase epitaxy of gallium arsenide

✍ Scribed by L. G. Lavrent'eva; S. E. Toropov; L. P. Porokhovnichenko

Book ID
112425977
Publisher
Springer
Year
1982
Tongue
English
Weight
339 KB
Volume
25
Category
Article
ISSN
1573-9228

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