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Effects of Film Thickness and Molecular Weight on the Interfacial Dynamics of Atactic Poly(methyl methacrylate) †

✍ Scribed by Freedman, Miriam A.; Becker, James S.; Sibener, S. J.

Book ID
126398312
Publisher
American Chemical Society
Year
2008
Tongue
English
Weight
282 KB
Volume
112
Category
Article
ISSN
0022-3654

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An experimental set-up based on multiwavelength interferometry, is applied in order to study in-situ the dissolution process of thin resist films. The interference function was the basis for a fitting algorithm, which analyses the experimental data and evaluates the progress of the resist thickness