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Free volume effects on the melt viscosity of low molecular weight poly(methyl methacrylate)

โœ Scribed by Kevin M O'Connor; Kevin M Scholsky

Book ID
107846122
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
617 KB
Volume
30
Category
Article
ISSN
0032-3861

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An experimental set-up based on multiwavelength interferometry, is applied in order to study in-situ the dissolution process of thin resist films. The interference function was the basis for a fitting algorithm, which analyses the experimental data and evaluates the progress of the resist thickness