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Effects of evolving surface morphology on yield during focused ion beam milling of carbon

โœ Scribed by D.P. Adams; T.M. Mayer; M.J. Vasile; K. Archuleta


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
638 KB
Volume
252
Category
Article
ISSN
0169-4332

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Effects of focused ion beam milling on t
โœ S. Shim; H. Bei; M.K. Miller; G.M. Pharr; E.P. George ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 916 KB

Focused ion beam (FIB) milling is the typical method used to fabricate micropillars to study small-scale plasticity and size effects in uniaxial compression. However, FIB milling can introduce defects into the milled pillars. To investigate the effects of FIB damage on mechanical behavior, we tested