Effects of deposition temperature, sample thickness and doping on the microstructures of a-Si:H
β Scribed by Seung-Hun Yang; Choochon Lee
- Book ID
- 118332065
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 265 KB
- Volume
- 59-60
- Category
- Article
- ISSN
- 0022-3093
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract In this study, the deposition temperature effects on the properties of hydrogenated amorphous silicon films are reported. The aβSi:H thin films were deposited by DC magnetron sputtering technique, according to a new protocol of deposition. This last consists of a successively several th
The in uence of the thickness of the a-Si : H ΓΏlm on its optical properties was studied using spectrophotometric measurements of the ΓΏlm transmittance and re ectance in the wavelength range 200 -3000 nm. Both the refractive index and the absorption coe cient were found to increase as the ΓΏlm thickne