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Effects of deposition temperature on the crystallinity of Ga-doped ZnO thin films on glass substrates prepared by sputtering method

โœ Scribed by Yu Jin Park; Hyuk Nyun Kim; Hyun Ho Shin


Book ID
108063922
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
605 KB
Volume
255
Category
Article
ISSN
0169-4332

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Effects of substrate temperature on crys
โœ Takahiro Yamada; Aki Miyake; Seiichi Kishimoto; Hisao Makino; Naoki Yamamoto; Te ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 261 KB

The effects of substrate temperature, T s , on the crystallinity and the electrical properties of Ga-doped ZnO films (GZO) with a thickness of 200 nm were investigated. GZO films were prepared on glass substrates at various T s in the range from 150 to 400 ยฐC by ion-plating method with DC arc discha