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Effects of deposition parameters on laser-induced damage threshold of Ta2O5 films

โœ Scribed by Cheng Xu; Yinghuai Qiang; Yabo Zhu; Jianda Shao; Zhengxiu Fan; Jinhong Han

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
506 KB
Volume
42
Category
Article
ISSN
0030-3992

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Effects of deposition rates on laser dam
Effects of deposition rates on laser damage threshold of TiO2/SiO2 high reflectors
โœ Jianke Yao; Cheng Xu; Jianyong Ma; Ming Fang; Zhengxiu Fan; Yunxia Jin; Yuanan Z ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 604 KB

TiO 2 single layers and TiO 2 /SiO 2 high reflectors (HR) are prepared by electron beam evaporation at different TiO 2 deposition rates. It is found that the changes of properties of TiO 2 films with the increase of rate, such as the increase of refractive index and extinction coefficient and the de