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Effects of catalysts and additives on fluorocarbon removal with surface discharge plasma

โœ Scribed by Atsushi Ogata; Hyun-Ha Kim; Shigeru Futamura; Satoshi Kushiyama; Koichi Mizuno


Book ID
113459700
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
154 KB
Volume
53
Category
Article
ISSN
0926-3373

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