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Effects of bias voltage and temperature on mechanical properties of Ti–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniques

✍ Scribed by Sung Ryong Choi; In-Wook Park; Sang Ho Kim; Kwang Ho Kim


Book ID
114085738
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
205 KB
Volume
447-448
Category
Article
ISSN
0040-6090

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