Effects of annealing on electron cyclotron resonance plasma-induced damage in GaAs/Ga0.5In0.5P quantum well wires structures

✍ Scribed by I. Maximov; L. Landin; L. Samuelson

• Book ID: 114155822
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 254 KB
• Volume: 41-42
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(98)00097-5