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Effects of (002) β-Ta barrier on copper chemical mechanical polishing behavior

✍ Scribed by Wang, Yu-Sheng; Chen, Kei-Wei; Cheng, Min-Yuan; Lee, Wen-Hsi; Wang, Ying-Lang


Book ID
120349024
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
319 KB
Volume
529
Category
Article
ISSN
0040-6090

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