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Effects O2plasma surface treatment on the electrical properties of the ITO substrate

โœ Scribed by Jin-Woong Hong, Dong-Hoon Oh, Sang-Min Shim, Young-Sang Lee, Yong-Gil Kang, Jong-Yeol Shin


Book ID
119977828
Publisher
The Korean Physical Society
Year
2012
Tongue
English
Weight
352 KB
Volume
60
Category
Article
ISSN
0374-4884

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The effect of different annealing methods on the sheet resistance of indium tin oxide (ITO) on polyimide (PI) substrate has been investigated. ITO thin films were prepared by RF magnetron sputtering in pure Ar gas and electro-annealing, this was carried out in the flow of an electric current at seve