## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or preβexisting de
β¦ LIBER β¦
Effect of volume charge on the electron transmission and backscattering coefficients for irradiation of dielectrics
β Scribed by V. A. Dyrkov
- Publisher
- Springer US
- Year
- 1989
- Tongue
- English
- Weight
- 297 KB
- Volume
- 66
- Category
- Article
- ISSN
- 1573-8205
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