Diamond-like Carbon(DLC) films were deposited by linear ion source (LIS)-physical vapor deposition method changing the anode voltages from 800V to 1800V, bias voltages from earth to -200V and characteristics of the films were investigated using Nano-indentation, Micro raman spectroscopy, Field Emiss
Effect of voltage on diamond-like carbon thin film using linear ion source
โ Scribed by Kim, Wang Ryeol; Park, Min Seok; Jung, Uoo Chang; Kwon, Ah Ram; Kim, Yong Whan; Chung, Won Sub
- Book ID
- 122597967
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 1020 KB
- Volume
- 243
- Category
- Article
- ISSN
- 0257-8972
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