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Effect of UV lamp irradiation during oxidation of Zr/Pt/Si structure on electrical properties of Pt/ZrO2/Pt/Si structure

✍ Scribed by Joon Woo Bae; Jae-Won Lim; Kouji Mimura; Masahito Uchikoshi; Takamichi Miyazaki; Minoru Isshiki

No coin nor oath required. For personal study only.

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