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Effect of biasing at elevated temperature on the electronic structure of Pt/HfO2/Si stacks

✍ Scribed by Yu. Matveyev; A. Zenkevich; Yu. Lebedinskii; S. Thiess; W. Drube


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
567 KB
Volume
88
Category
Article
ISSN
0167-9317

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A composite nano-crystalline structured thin film was realized by depositing mixed Al 2 O 3 and MgO coating material using physical vapor deposition approach and then annealing at high temperature. The film thus fabricated retains a high transmission even after annealing at 1500 β€’ C. The grain size