Effect of ultraviolet illumination on the charge trapping behaviour in SiNx/InP metal-insulator-semiconductor structure provided by plasma enhanced chemical vapour deposition

✍ Scribed by C. H. Kim; I. K. Han; J. I. Lee; K. N. Kang; S. D. Kwon; B. Choe; H. L. Park; J. Her; H. Lim

• Book ID: 104825826
• Publisher: Springer
• Year: 1994
• Tongue: English
• Weight: 276 KB
• Volume: 13
• Category: Article
• ISSN: 0261-8028
• DOI: 10.1007/bf00592609