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Effect of transverse current injection during vacuum arc deposition of TiN

✍ Scribed by N Parkansky; V Zhitomirsky; B Alterkop; S Goldsmith; R.L Boxman; Yu Rosenberg; Z Barkay

Book ID: 108422790
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 536 KB
Volume: 133-134
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(00)00882-3

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