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Effect of total reaction pressure on electrical properties of boron doped homoepitaxial (100) diamond films formed by microwave plasma-assisted chemical vapor deposition using trimethylboron

โœ Scribed by Tsubota, T; Fukui, T; Kameta, M; Saito, T; Kusakabe, K; Morooka, S; Maeda, H


Book ID
122970173
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
237 KB
Volume
8
Category
Article
ISSN
0925-9635

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