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Effect of Ti interlayer on the growth of carbon nanotubes on Si by microwave-heated chemical vapor deposition

โœ Scribed by Huang, J. H.; Chen, Y. S.; Chuang, C. C.; Wong, Y. M.; Kang, W. P.

Book ID
121753891
Publisher
AVS (American Vacuum Society)
Year
2005
Tongue
English
Weight
751 KB
Volume
23
Category
Article
ISSN
0734-211X

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