Selective growth of carbon nanotube on scanning probe tips by microwave plasma chemical vapor deposition

✍ Scribed by F. M. Pan; Y. B. Liu; Y. Chang; C. Y. Chen; T. G. Tsai; M. N. Chang; J. T. Sheu

• Book ID: 121747977
• Publisher: AVS (American Vacuum Society)
• Year: 2004
• Tongue: English
• Weight: 525 KB
• Volume: 22
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.1640399