Effect of thermal etching on silicon epitaxial growth by vacuum sublimation : A. Kimura and C. A. Lee. Solid State Electronics18, 901 (1975)

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 264 KB
• Volume: 15
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(76)90113-x