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Effect of thermal annealing on elastic properties of Ag/Pd superlattice films

โœ Scribed by Sukmock Lee; George I. Stegeman; Jeha Kim; Charles M. Falco; Vahid Askarpour; Murli H. Manghnani


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
271 KB
Volume
94
Category
Article
ISSN
0038-1098

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The influence of rapid thermal annealing of 700ยฐC and 800ยฐC in 5x 10e5 mbar vacuum on the structure and morphology of aluminum and silver thin films, deposited on quartz substrates is investigated. The metal films studied have thicknesses of 200 nm and 120 nm for AI and Ag, respectively, when the a