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Effect of thermal annealing and Al2O3-interlayer on intermixing in the TiN/SiO2/Si structure

✍ Scribed by Konyushenko, M.A.; Konashuk, A.S.; Sokolov, A.A.; Schaefers, F.; Filatova, E.O.

No coin nor oath required. For personal study only.

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